Micromechanical component i.e. z-sensor, for use as acceleration sensor in motor vehicle, has movable mass deflectably mounted at substrate, and spring structure with spring elements formed and running perpendicular to each other

摘要

The component (100) has a substrate (110), and a mass e.g. rocker switch (145), movably arranged in a distance to the substrate. A spring structure is arranged in a distance to the substrate and connected with the movable mass. The movable mass is deflectably mounted at the substrate. The spring structure exhibits spring elements e.g. torsion bar and crossbar, formed and running perpendicular to each other. A supporting element (149) is arranged on the substrate and connected with the spring structure.