| 摘要 |
<p>Provided is a flow regulating valve (4) wherein the number of components are small, the components can be easily assembled, the size can be easily reduced, and problems such as an insulation failure tend not to occur. A valve body member (41) is comprised of a cylindrical housing (411a), a diaphragm member (411b) functioning as an elastically deformable valve body integrally formed with the housing (411a) so as to close one end surface of the housing, an extendable piezoelectric element (412) having a tip end disposed so as to abut with the inner surface of the diaphragm member (411b), a retractable rod (411c.2) attached to the other end of the housing (411a) so as to be retractable in a direction identical to the direction that the piezoelectric element (412) is extended or contracted, and a deformable airtight maintaining member (411c.3) which is provided further inside the housing than the retractable rod so that the airtightness within the housing is maintained. The retractable rod abuts with the piezoelectric element via the airtight maintaining member, to adjust the position of the piezoelectric rod.</p> |
