PROBE CARD

摘要

A probe card is used for testing electrical characteristics of a body under test. The probe card comprises: a plurality of probes for contacting a body under test during testing; a plurality of tester chips for sending and receiving electric test signals to and from the body under test and testing electrical characteristics of the body under test; a conductive portion, on the lower surface of which the probes are disposed and which electrically connects the probes and the tester chips corresponding to the respective probes; and a pressing portion for, during the testing, pressing the conductive portion toward the side of the body under test and applying a pressing force between the probes and the body under test.