| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for suppressing generation of ozone decomposition in a liquid sealing section, eliminating the risk of breaking the apparatus, and enabling to produce liquid ozone, stably. SOLUTION: The apparatus and method prevent the liquid ozone from abnormal storage at a separation interface 7 and from jetting at a vaporization portion 2 by the followings: enabling to feed the liquid ozone to liquid seal piping 6 and to prevent storage of a prescribed amount or more (abnormal storage) of the liquid ozone on the inlet side of the liquid seal piping 6 by keeping a constant liquid level at the separation interface 7, by heightening a pressure to the separation interface 7 through the regulation with a valve V1 to control the pressure to the separation interface 7; and enabling to prevent jetting of the liquid ozone at the vaporization portion 2 by lowering the pressure to the separation interface 7, when the pressure thereto becomes overpressure. COPYRIGHT: (C)2011,JPO&INPIT |
