| 摘要 |
PROBLEM TO BE SOLVED: To provide the holder of a substrate for forming carbon nanotubes where thermal strain on the substrate is not caused when forming the carbon nanotubes. SOLUTION: The holder 2 of the substrate 1 for forming the vertically aligned carbon nanotubes on the surface of the substrate 1 and having a rectangular shape in plane view is constituted by a supporting member 3 having a middle flat part 3a which supports the substrate and edge parts 3b whose heights are lower than that of the flat part and which exist at both sides and a rectangular frame member 4 having a guiding space 4a to guide the flat part of the supporting member and holding the substrate by pressing both edge parts 1a of the substrate 1 placed on the flat part to both edge parts 3b of the supporting member. Further, the substrate, the supporting member and the frame member are constituted of a metal material and materials having larger linear expansion coefficient than that of the substrate are used for the supporting member and the frame member. COPYRIGHT: (C)2011,JPO&INPIT |
