| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To inexpensively achieve a structure for reducing parasitic capacitance between wirings. <P>SOLUTION: A surface acoustic wave filter includes a piezoelectric substrate 1, resonators 2a and 2b formed on the piezoelectric substrate 1 and including interdigital electrodes, a wiring part 3 connected to the interdigital electrodes, and a dielectric layer 4 formed to cover the interdigital electrodes. The wiring part 3 includes a lower layer wiring part 3d on the same layer as the interdigital electrodes and an upper layer wiring part 3e disposed above the lower layer wiring part 3d. The upper layer wiring part 3e includes a region having an electrode width wider than the electrode width of the lower layer wiring part 3d. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
