发明名称 PATTERN DRAWING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To quickly draw a drawing pattern, and to restore a pattern drawing apparatus in a short period of time in contingency. <P>SOLUTION: A quickly readable storage 62 for storing a plurality of drawing data in a plurality of partitions 621 is provided to the pattern drawing apparatus. The identification information of the drawing pattern of the drawing data stored in each partition 621 and management information 71 coordinating the identification information of the partition 621 are stored in a fixed disk 614. The partition 621 coordinated with reference to the management information 71 with the use of the identification information of the drawing pattern to be drawn is specified, and the drawing data are outputted to an optical head 41 at a fast transfer rate to quickly draw the drawing pattern. In addition, the management information 71 is backed up in a storing part 601 in order to restore the pattern drawing apparatus 1 in a short period of time even if the management information 71 is lost in contingency. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011071290(A) 申请公布日期 2011.04.07
申请号 JP20090220722 申请日期 2009.09.25
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 TERAUCHI SHUNSUKE
分类号 H01L21/027 主分类号 H01L21/027
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