LOW-POWER FORCE SENSOR

摘要

A force sensor utilizing force sensing element to generate an output signal that is commensurate with the force applied to the sensor. The force sensor includes a support element coupled to a resilient deflectable portion and at least one pivotable arm portion extending from the resilient deflectable portion; and a force sensing element supported by the base element and operably coupled to the at least one pivotable arm portion, wherein the force sensing element outputs an output signal that is proportional to a force applied to the at least one pivotable arm portion. The force sensor may be used a mass flow meter by coupling a fluid passage to the force sensor. The structure of the force sensor makes use of mechanical amplification to greatly increase the sensitivity of the sensor.