FLOW RATE MEASURING MECHANISM, MASS FLOW CONTROLLER, AND PRESSURE SENSOR

摘要

A flow rate measuring mechanism is provided with: a body unit having an internal flow path through which a fluid to be measured flows; and a pressure sensor mounted to the body unit and detecting the pressure in the internal flow path, and the flow rate measuring mechanism is configured so that the flow rate of the fluid can be calculated on the basis of the fluid pressure detected by the pressure sensor. The body unit has a longitudinal direction, and a component mounting surface is defined on a surface of the body unit, said surface being that which is parallel to the longitudinal direction. The pressure sensor is mounted to the component mounting surface in such a manner that the pressure sensing surface of the pressure sensor is substantially perpendicular to the component mounting surface and is substantially parallel to the longitudinal direction. As a result of the configuration, the dimension of the flow rate measuring mechanism in the widthwise direction thereof is drastically reduced in comparison with conventional products without a reduction in the sensitivity of pressure measurement.