| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of forming an all solid plane thin-film lithium ion secondary battery at a low cost. <P>SOLUTION: The forming method comprises: a step to form a groove on a substrate 10 consisting of silicon or silicon oxide; a step to deposit a stack having a positive electrode collector layer 16, a positive electrode layer 18, a solid electrolyte layer 20, and a negative electrode layer 22; a step to form a negative electrode collector layer 26 filling the space remaining in the groove as the deposit has a thickness smaller than the depth of the groove; and a step to flatten the exposed surface of the negative electrode collector layer 26. A positive electrode side lead 42 and the negative electrode side lead 40 are arranged on an identical surface side. <P>COPYRIGHT: (C)2011,JPO&INPIT |
