CATALYTIC CVD DEVICE, FILM FORMING METHOD AND SOLAR CELL MANUFACTURING METHOD

摘要

A catalytic CVD device (100), wherein a control unit controls the temperature of a catalyst wire (13) to a standby temperature for a prescribed amount of time before and after a film is formed. The standby temperature is lower than the temperature of the catalyst wire (13) when the film is being formed, and is a prescribed temperature above room temperature.