| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone gas generator which generates high purity and high concentration ozone gas stably from the starting stage. SOLUTION: The ozone gas generator generates ozone gas by using high purity oxygen gas as a raw material gas. In the generator, a dielectric 13 is provided on the opposing surface side of each of a pair of electrodes 14, 14. An electric discharge space 20 to which a raw material gas supply passage and an ozone gas taking-out passage are connected is formed between the pair of dielectrics 13, 13. In the pair of dielectrics 13, 13, a functional film 17 facing to the electric discharge space 20 is provided, and chromium oxide is incorporated in the functional film 17. COPYRIGHT: (C)2011,JPO&INPIT |
