| 摘要 |
PROBLEM TO BE SOLVED: To prevent the determination of the contravention of a design rule at a macro cell in density verification for an entire chip. SOLUTION: A pattern density verification method comprises steps for: setting an inside auxiliary section and an outside auxiliary section at the inside and the outside, respectively, in a verification area (step S19); and determining whether or not the pattern density D2 of the verification area in which the pattern occupation area of the outside auxiliary section is added to the pattern occupation area of the inside auxiliary section satisfies a density standard (step S20). COPYRIGHT: (C)2011,JPO&INPIT
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