发明名称 |
VARIABLE ENERGY CHARGED PARTICLE SYSTEMS |
摘要 |
<p>Charged particle system are disclosed and include a first voltage source, a second voltage source electrically isolated from the first voltage source, a charged particle source electrically connected to the first voltage source, and an extractor electrically connected to the second voltage source. Methods relating to the charged particle systems are also disclosed.</p> |
申请公布号 |
WO2011041100(A1) |
申请公布日期 |
2011.04.07 |
申请号 |
WO2010US48877 |
申请日期 |
2010.09.15 |
申请人 |
CARL ZEISS NTS, LLC;HILL, RAYMOND;NOTTE IV, JOHN A. |
发明人 |
HILL, RAYMOND;NOTTE IV, JOHN A. |
分类号 |
H01J37/26;H01J37/06;H01J37/08;H01J37/24 |
主分类号 |
H01J37/26 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|