| 摘要 |
PURPOSE: A plasma reactor with a remote plasma generator and holder therefor are provided to support the remote plasma generator by the support stand, thereby preventing the plasma reactor from being cracked. CONSTITUTION: A rotation structure supports a remote plasma generator(20) installed on a process chamber. The rotation structure fixes or separates the remote plasma generator to or from the process chamber. A vertical support stand(12) is installed outside the processing chamber. A horizontal support stand(14) is connected to the vertical support stand to support the remote plasma generator. A support plate is placed between the horizontal support stand and the remote plasma generator to support the remote plasma generator.
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