发明名称 WAFER LEVEL PACKAGE HAVING THROUGH SILICON VIA
摘要 <p>PURPOSE: A wafer level package with a penetration electrode and a manufacturing method thereof are provided to stack semiconductor dies without increasing the thickness of a semiconductor package, thereby miniaturizing the semiconductor package. CONSTITUTION: A first semiconductor die comprises first and second sides and a penetration electrode(115). An active area is formed on the first side. A pocket is formed on the second side. The penetration electrode penetrates the first and second sides and is formed on an active area and the outer circumference of the pocket. A second semiconductor die(120) is placed in the pocket of the first semiconductor die. A rewiring layer(140) electrically connects the penetration electrode of the first semiconductor die with the second semiconductor die. The penetration electrode is made of solder balls connected to the rewiring layer.</p>
申请公布号 KR20110036249(A) 申请公布日期 2011.04.07
申请号 KR20090093807 申请日期 2009.10.01
申请人 AMKOR TECHNOLOGY KOREA, INC. 发明人 PAEK, JONG SIK;DO, WON CHUL;LEE, JUN SU
分类号 H01L23/48;H01L21/60 主分类号 H01L23/48
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