| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem in which cooling performance of a laser oscillator is presumably insufficient due to rise in temperature of cooling water on a supplying path, if the supplying path of the cooling water is long that cools the laser oscillator inside a laser irradiation apparatus disposed in water and if the ambient temperature is unknown. <P>SOLUTION: A temperature sensor T1 which measures the temperature in the inside of the environment isolation container is installed in the laser irradiation apparatus 1. The temperature and/or the flow quantity of the cooling water to be supplied is controlled on the basis of the measurement results obtained from the temperature sensor T1, so that the laser oscillator 21 may be properly cooled. <P>COPYRIGHT: (C)2011,JPO&INPIT |
