| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce spurious and to obtain excellent characteristics, without using any expensive device, by enabling an acoustic wave device to be formed, the acoustic wave device being constituted of a plurality of piezoelectric thin film resonators having different resonant frequencies within the same chip. <P>SOLUTION: A frequency control film 51 has a plurality of protruding island patterns 151 or a plurality of hole patterns. The island patterns 151 are disposed between resonators with a common spurious adjustment pitch and different areas. The hole patterns are provided between the resonators with a common spurious adjustment pitch and different opening areas. <P>COPYRIGHT: (C)2011,JPO&INPIT |
