| 摘要 |
Filament electric discharge ion source (1) including an ionization chamber (3) provided with internal walls and configured so as to contain a gas to be ionized, filaments (13) placed in the ionization chamber (3) and a power supply (19) for applying voltage to the filaments, in which the filaments (13) are placed so as to be substantially parallel to one another and connected to the power supply (19) through the internal walls, at least one first filament being connected to the power supply through a first internal wall and at least one second filament being connected to the power supply through a second internal wall opposite the first internal wall.
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