发明名称 PATTERN DRAWING APPARATUS AND PATTERN DRAWING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To easily verify the presence or absence of abnormality in a drawing raster data. <P>SOLUTION: A pattern drawing apparatus is provided, in which an input raster data is received by a data receiving unit 63. The input raster data is prepared by adding a dummy raster data representing a check pattern to a drawing raster data representing a drawing pattern. Region information representing a region of the check pattern in the whole pattern represented by the input raster data, and a reference raster data representing a check pattern are separately prepared. By comparing the part of the input raster data corresponding to the check pattern region based on the region information with the reference raster data by a comparator 64, the presence or absence of abnormality in the input raster data received by the data receiving unit 63 is checked. Thus, reliability of pattern drawing can be enhanced by easily verifying, in real time, the presence or absence of abnormality in a drawing raster data used for drawing a pattern. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011069974(A) 申请公布日期 2011.04.07
申请号 JP20090220708 申请日期 2009.09.25
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 YOSHIOKA MASAKI
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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