| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of carrying out inspection of an organic EL display panel during its manufacturing stage and correcting discovered defects, without the characteristics of its components to deteriorate. SOLUTION: A substrate 31 is irradiated by illumination light for inspection from an illumination means for inspection 26 and inspected by taking photograph using a camera 33. The illumination means for inspection 26 is equipped with a band-pass filter which transmits only the wavelengths that do not influence the characteristics deterioration. Depending on the absorption characteristics of organic EL materials to be used, the band-pass filter is selected which passes only the wavelengths that do not absorb. During inspection, a nitrogen atmosphere area 231 sealed by a housing 23 is filled with high-cleanliness nitrogen supplied from a nitrogen supply piping 22 to always keep the area at a low oxygen condition, and exhausted from an exhaust piping 24. COPYRIGHT: (C)2011,JPO&INPIT |
