| 摘要 |
PROBLEM TO BE SOLVED: To suppress warpage of a mirror part due to polishing and a dynamic deformation at high speed oscillation time in an optical scanner in which a torsional oscillation is generated in the mirror part by making use of the oscillation of a substrate having torsional beam parts which support the mirror part. SOLUTION: The optical scanner includes: a substrate body; two cantilever beams projected from both side parts of one side of the substrate body; the mirror part of which both sides are supported by torsional beam parts between the cantilever beams; a driving source which oscillates the substrate body; and a light source which projects light on to the mirror part. In the optical scanner, the fixed end part on the opposite side of the mirror part side, of the substrate body is fixed on a supporting member, the driving source is provided at a part of the substrate body, the mirror part is oscillates in resonance according to the oscillation applied to the substrate by the driving source, the direction of the reflected light of the light projected from the light source to the mirror part varies according to the oscillation of the mirror part, wherein. an Si mirror is attached and fixed to the mirror part. COPYRIGHT: (C)2011,JPO&INPIT
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