发明名称 METHOD OF MANUFACTURING LATERAL DIFFUSION METAL OXIDE SEMICONDUCTOR DEVICE
摘要 A method of manufacturing a lateral diffusion metal oxide semiconductor device includes following steps. First, a substrate having a first conductive type is provided. The substrate has a well, and the well has a second conductive type. Then, a body region is formed in the well, and a channel defining region is formed in the body region. The body region has the second conductive type, and the channel defining region has the first conductive type, so that the body region disposed between the channel defining region and the well and uncovered with the channel defining region forms a channel of the lateral diffusion metal oxide semiconductor device. Then, a gate structure is formed on the channel.
申请公布号 US2011081760(A1) 申请公布日期 2011.04.07
申请号 US20090571451 申请日期 2009.10.01
申请人 HUANG BO-JUI 发明人 HUANG BO-JUI
分类号 H01L21/336 主分类号 H01L21/336
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