发明名称 FERROELECTRIC CAPACITOR ENCAPSULATED WITH A HYDROGEN BARRIER
摘要 An integrated circuit containing a ferroelectric capacitor, an underlying hydrogen barrier, and an overlying hydrogen barrier layer. A method for forming an integrated circuit containing a ferroelectric capacitor, an underlying hydrogen barrier, and an overlying hydrogen barrier layer.
申请公布号 US2011079878(A1) 申请公布日期 2011.04.07
申请号 US20100890219 申请日期 2010.09.24
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 AGGARWAL RAJNI J.;SUMMERFELT SCOTT R.;BASIM GUL B.;MOISE TED S.
分类号 H01L29/92;H01L21/00 主分类号 H01L29/92
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