| 摘要 |
<p>PURPOSE: A substrate processing system and substrate transferring method are provided to improve processing capability by using a substrate transfer device for more rapidly returning a substrate. CONSTITUTION: A substrate processing system a posting support, a second substrate accepting part, a substrate transfer device(50), and a control device. The first substrate accepting part is located on the posting support. The first substrate accepting part accepts substrates with piled. The second substrate accepting part accepts a plurality of substrates. The substrate transfer device returns the substrate from the first substrate receiver to the second substrate accepting part. The substrate transfer device comprises a fork supporting part and forks(54a,54b). The fork supporting part moves up and down toward the first substrate receiver and the second substrate accepting part. The control device controls each fork of the substrate transfer device.</p> |
