SPUTTER FOR FABRICATING LIQUID CRYSTAL DISPLAY DEVICE

摘要

PURPOSE: A sputter for fabricating a liquid crystal display device is provided to prevent a sharp temperature change and physical shock since a carrier shield is mounted on the lower part of a floating shield. CONSTITUTION: A sputter for fabricating a liquid crystal display device comprises a chamber, a target, a chamber shield(101), a floating shield(102), and a carrier shield(103). The chamber helps a substrate move. The chamber enables a carrier(202) for fixing the substrate to move by deposition. The target is formed from the same material that is to be deposited on the substrate. The chamber shield is arranged on the edge of the inside of the chamber. The chamber shield prevents the deposition of a deposition material to the inner wall of a chamber. The floating shield is arranged on the lower part of the chamber shield. The floating shield prevents the deposition of the deposition material to the edge of the substrate.