| 摘要 |
PURPOSE: A microscope moving system of a panel inspection system is provided to actively perform a panel inspection by preventing a wire for fixing the position of a microscope from getting loose. CONSTITUTION: A microscope moving system of a panel inspection system comprises fine adjustment handles(230), pulleys(250), and a timing belt(270). The fine adjustment handles are installed in a microscope part. When the fine adjustment handles are turned, the pulleys are rotated by bearings and shafts connected to the fine adjustment handles. The position of a camera(210) is precisely adjusted to an optimum inspection position by the pulleys and the timing belt connected to idlers(260).
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