Method and device for treating objects with a physical plasma at atmospheric pressure

摘要

The method involves supplying gas (11) to a discharge chamber (6), and generating physical plasma in the discharge chamber by electric discharge from the gas. The physical plasma is passed from the discharge chamber into a treatment chamber (2), where the physical plasma acts on an object (14) to be treated. The physical plasma is downwardly entered into the treatment chamber from the discharge chamber by a perforated bottom (5) with holes (12). A plasma pad (13) is formed at an upper side of the perforated bottom by the plasma, where the pad supports the object to be treated. An independent claim is also included for a device for handling objects with physical plasma at atmospheric pressure.