| 摘要 |
PURPOSE: A brush roll for a semiconductor wafer is provided to secure the smooth flow of cleaning water by preventing the discharge hole of a core from being stopped. CONSTITUTION: A discharge path(210) is formed in a core in a longitudinal direction. A plurality of discharge holes(220) connected to the discharge path are formed on the outer side of the core. A plurality of protrusions(310) are formed on the outer surface of a brush(300). A support member(400) firmly mounts the brush on the core and is comprised of a wing unit(420) and a mounting unit(410).
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