发明名称 BARRIER LAYER AND METHOD FOR MAKING THE SAME
摘要 The invention relates to a method for manufacturing an article comprising a barrier layer, the method comprising - providing an metallic or metalloid layer to a surface of a substrate by electro-deposition, using a plating liquid comprising an ionic liquid and metal ions or metalloid ions, which metal ions or metalloid ions are reduced and deposited to form the metallic or metalloid layer during the electro-eleposition; and - preferably at least partially oxidising the metallic or metalloid layer.
申请公布号 EP2142685(B1) 申请公布日期 2011.04.06
申请号 EP20080741641 申请日期 2008.04.17
申请人 NEDERLANDSE ORGANISATIE VOOR TOEGEPAST -NATUURWETENSCHAPPELIJK ONDERZOEK TNO 发明人 VAN MOL, ANTONIUS MARIA BERNARDUS;SCHOO, HARMANNUS FRANCISCUS MARIA;BRESSERS, PETRUS MARINUS MARTINUS CORNELUS;VAN ERKEL, JOOST;KOETSE, MARINUS MARC
分类号 C25D3/66;C25D5/18;H01L51/00;H01L51/10;H01L51/44;H01L51/52 主分类号 C25D3/66
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