发明名称 COMPOSITION FOR POSITIVE TYPE PHOTORESIST AND POSITIVE TYPE PHOTORESIST FILM MANUFACTURED THEREBY
摘要 Disclosed are a composition for positive type photoresist and a positive type photoresist film manufactured thereby. The composition comprises an alkali soluble resin, a photosensitive compound, a thermo-curable cross linking agent, a sensitivity enhancer and a solvent. The photoresist film has a supporting film and a photoresist layer formed on the supporting film, wherein the photoresist layer comprises the alkali soluble resin, the photosensitive compound, the thermo-curable cross linking agent and the sensitivity enhancer.
申请公布号 EP2016463(A4) 申请公布日期 2011.04.06
申请号 EP20070745866 申请日期 2007.04.06
申请人 KOLON INDUSTRIES, INC. 发明人 KIM, BYOUNG-KEE;PARK, SE-HYUNG;LEE, BYRONG-IL;PARK, JONG-MIN;SONG, SEOG-JEONG
分类号 G03F7/008;H01L21/027 主分类号 G03F7/008
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