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发明名称
THIN SACRIFICIAL MASKING FILMS FOR PROTECTING SEMICONDUCTORS FROM PULSED LASER PROCESS
摘要
申请公布号
EP2304776(A1)
申请公布日期
2011.04.06
申请号
EP20080876399
申请日期
2008.07.16
申请人
SIONYX, INC.
发明人
CAREY, JAMES
分类号
H01L21/225;H01L21/268;H01L27/144;H01L27/146
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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