发明名称
摘要 PROBLEM TO BE SOLVED: To provide a bonding tool of a bonding body and a bonder in which stabilized vibration is transmitted to a bonding action portion by tightening the bonding action portion and a vibration transmitting portion through a simple structure. SOLUTION: A bonding action portion 13 and a tightening member 14 are inserted into an opening formed in a vibration transmitting portion 11, and a screw 18 provided to intersect the tightening member 14 perpendicularly is tightened furthermore thus bringing a pair of internally tapered surfaces 16a and 16b formed oppositely at one end of the opening in the vibration transmitting direction close to each other, so that the tightening member 14 is moved to the bonding action portion 13 side by pressing the externally tapered surface 14a of the tightening member 14. Consequently, the bonding action portion 13 is clamped in a state pressed between the abutting surface 14b of the tightening member 14 and the other end 15a of the opening in the vibration transmitting direction and tightened to the vibration transmitting portion 11. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP4665657(B2) 申请公布日期 2011.04.06
申请号 JP20050236281 申请日期 2005.08.17
申请人 发明人
分类号 H01L21/60;H01L21/607 主分类号 H01L21/60
代理机构 代理人
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