| 摘要 |
<p>PURPOSE: A substrate processing apparatus and a substrate transferring method are provided to simplify the transferring recipe by writing the transferring recipe by generating the transferring route of an object substrate automatically. CONSTITUTION: A transferring block(1) comprises a placement table(11) for placing the hoop(F) and a transferring apparatus(10) for transferring the wafer in and out. A processing block(2) comprises a cleaning process part(3) performing the scrub washing on the wafer. A transmission/shifter(4) comprises a laminate tower(21) and a transferring apparatus(20).</p> |
