| 摘要 |
PROBLEM TO BE SOLVED: To provide a scribing apparatus which can prevent a scriber from deflecting in a dividing direction without increasing the rigidity of an arm to which the scriber is attached. SOLUTION: This scribing apparatus has a chuck table 33 holding an object and a scriber unit 6 forming scribe lines on the surface of the object held by the chuck table 33. The scriber unit 6 has a base 61, an arm 62 whose middle part is supported by the base 61 so as to rotate in a plane vertical to the object holding surface of the chuck table 33, a scriber attached to one end of the arm 62, a loading means 64 which applies a prescribed load to the other end of the arm 62 so as to make the one end of the arm 62 turn toward the object holding surface, and a deflection restricting means 7 which restricts the relative displacement of the arm 62 to the base 61 in a dividing and feeding direction. |
