CATADIOPTRIC PROJECTION OBJECTIVE

摘要

PURPOSE: A catadioptric projection objective lens is provided to produce semiconductor elements with uniform quality using a lithography method. CONSTITUTION: A catadioptric projection objective lens comprises a first partial objective lens(11), a second partial objective lens(15), and a third partial objective lens(19). The first partial objective lens images an object field on a first middle real image(13). The second partial objective lens images the first middle real image on a second middle real image(17). The second partial objective lens has one concave mirror(21) and one or more lenses(23). The third partial objective lens images the second middle real image on an image filed(7).