发明名称 Semiconductor electronic device and method of manufacturing thereof
摘要 A semiconductor electronic device (1) is disclosed, which comprises a die (2) of semiconductor material and a support (3), the die (2) of semiconductor material including an integrated electronic circuit and a plurality of contact pads (6) associated with the electronic circuit and connected electrically to the support (3) by wire leads (4), characterized in that each contact pad of said plurality of contact pads (6) comprising a lower layer (7) of copper, or alloys thereof; and an upper layer. Advantageously, the upper layer consists of: a first film (9) of palladium or alloys thereof, overlying the lower layer (7) of copper or alloys thereof; and optionally a second film (10) of gold or alloys thereof, overlying the first film (9) of palladium or alloys thereof. Moreover, the layer (7) or film (9, 10) are deposited by an electroless chemical process.
申请公布号 EP2306503(A2) 申请公布日期 2011.04.06
申请号 EP20100183300 申请日期 2001.12.14
申请人 STMICROELECTRONICS S.R.L. 发明人 TIZIANI, ROBERTO;PASSAGRILLI, CARLO
分类号 H01L21/60;H01L23/00;H01L23/485;H01L23/532 主分类号 H01L21/60
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