发明名称 Method of manufacturing localised patterns
摘要 The method involves coating solution on an upper face of a support (1) having first thermal conductivity, and evaporating the solution on the support. A cavity (8) is placed in contact with a lower face of the support. A mask (7) is made of material having second thermal conductivity, where ratio of first conductivity to the second conductivity is equal to or higher than 2, or less than or equal to 0.5 during process time. The cavity is filled by a filler material e.g. water, having third thermal conductivity. The mask is made of stainless steel, and the support is made of plastic material.
申请公布号 EP2306542(A1) 申请公布日期 2011.04.06
申请号 EP20100354042 申请日期 2010.09.03
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 BENWADIH, MOHAMED
分类号 H01L51/00;B81C1/00 主分类号 H01L51/00
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