发明名称 |
Droplet-ejecting head, droplet-ejecting apparatus, and piezoelectric element |
摘要 |
A droplet-ejecting head includes a substrate including a pressure chamber communicating with a nozzle hole and also includes a piezoelectric element (100) that includes a lower electrode (10), a piezoelectric layer (12) which overlies the lower electrode and which is made of perovskite-type oxide, and an upper electrode (14) overlying the piezoelectric element and that causes a change in pressure in a liquid contained in the pressure chamber. The piezoelectric layer includes a first piezoelectric sub-layer (12a) located on the lower electrode side and a second piezoelectric sub-layer (12b) located between the first piezoelectric sub-layer and the upper electrode. The first piezoelectric sub-layer has a polarization axis predominantly directed in an in-plane direction of the first piezoelectric sub-layer. The second piezoelectric sub-layer is predominantly (100)-oriented in the pseudocubic coordinate system. |
申请公布号 |
EP2305471(A1) |
申请公布日期 |
2011.04.06 |
申请号 |
EP20100181937 |
申请日期 |
2010.09.29 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
MIYAZAWA, HIROMU;MOROZUMI, KOICHI |
分类号 |
B41J2/14;B05C5/00;B41J2/045;B41J2/055;B41J2/135;B41J2/16;H01L41/09;H01L41/18;H01L41/22;H01L41/253;H01L41/39 |
主分类号 |
B41J2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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