发明名称 DRY FILM PHOTORESIST
摘要 PURPOSE: A dry-film photo-resist is provided to prevent the reduction of a transparent property and the reduction of developing speed by preventing the bad effect of an exposing process due to a supporting film. CONSTITUTION: A dry-film photo-resist includes a supporting film, a resin protective layer, and a photo-resist resin layer. The resin protective layer includes water-soluble polymer and alkoxyalcohol. The amount of alkoxyalcohol in the resin protective layer is less than 30000ppm. The alkoxyalcohol is butoxyethanol. The water-soluble polymer is dissolved in a solvent including water and the alkoxyalcohol. The dissolved polymer is coated on the supporting film in order to obtain the resin protective layer.
申请公布号 KR20110035680(A) 申请公布日期 2011.04.06
申请号 KR20090093493 申请日期 2009.09.30
申请人 KOLON INDUSTRIES, INC. 发明人 BONG, DONG HUN;MOON, HEE WAN;SUK, SANG HOON
分类号 G03F7/09 主分类号 G03F7/09
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