SEMICONDUCTOR DEVICE WITH ONE SIDE CONTACT AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A semiconductor device with a single side wall contact and manufacturing method thereof are provided to perform counter doping in a side wall opposite to cell bonding, thereby preventing floating body effects due to excessive spreading of cell bonding. CONSTITUTION: A first conductive layer pattern(22A) and a second conductive layer pattern(23A) are stacked on an active area(101). A hard mask film pattern(24A) is formed on the active area. A side wall contact(30) is connected to a side wall of a conductive layer pattern of the active area. A metal bit line(31) is connected to the side wall contact to partially embed a trench(26). A side wall oxide film(27) is formed on the side wall of the active area and a semiconductor substrate(21).