发明名称 Long-range surface plasmon optical waveguide sensor
摘要 The present invention provides a long-range surface plasmon optical waveguide sensor which has a reduced loss of an electromagnetic wave, an increased sensitivity and limitation of detection and a high analysis speed, and enables fabrication of a sensor of various sizes such as a small-sized or lightweight system, etc. To this end, the long-range surface plasmon optical waveguide sensor, comprising: a sensor section, wherein the sensor section comprises a substrate, a first dielectric layer stacked on the substrate, a metal thin film stacked on the first dielectric layer, a second dielectric layer stacked on the metal thin film and having a channel penetratingly formed therein in such a fashion that the top surface of the metal thin film is partially exposed into the channel, a metal strip stacked on the second dielectric layer in such a fashion that the underside thereof is partially exposed into the channel, and a third dielectric layer stacked on the metal strip; a light source section for inducing a surface plasmon resonance between the metal thin film and the metal strip; and a detection section for detecting and analyzing a change of light according to the surface plasmon resonance.
申请公布号 US7920268(B2) 申请公布日期 2011.04.05
申请号 US20080531220 申请日期 2008.02.28
申请人 IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) 发明人 SONG SEOK HO
分类号 G01N21/55;H01L27/18 主分类号 G01N21/55
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