| 摘要 |
An inspection apparatus includes a terahertz wave detection portion, a waveform shaping portion configured to shape a first answer signal with respect to a terahertz wave by using a signal acquired in the above-described terahertz wave detection portion, a measurement condition acquisition portion configured to acquire a first measurement condition, an answer signal storage portion configured to store second answer signals corresponding to measurement conditions, a selection portion configured to select the above-described second answer signal from the above-described answer signal storage portion, and a signal processing portion configured to conduct deconvolution with respect to the above-described first answer signal on the basis of the above-described second answer signal. |
