| 摘要 |
PURPOSE: A variable vacuum absorbing table is provided to efficiently prevent a vacuum loss and the deformation of an object by changing an absorption area of a table body according to the size of the object. CONSTITUTION: A table body(10) comprises a square absorption surface(12) with an absorption hole. A first blocking member(20) linearly reciprocates in a parallel direction to a first surface of the absorption surface. A first driving unit moves the first blocking member. A second blocking member(30) linearly reciprocates in a parallel direction to the second surface of the absorption surface. A second driving unit moves the second blocking member.
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