| 发明名称 |
Energy filter for cold field emission electron beam apparatus |
| 摘要 |
An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens.
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| 申请公布号 |
US7919749(B2) |
申请公布日期 |
2011.04.05 |
| 申请号 |
US20080234453 |
申请日期 |
2008.09.19 |
| 申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH |
发明人 |
ZHOU FANG;FROSIEN JUERGEN;ADAMEC PAVEL |
| 分类号 |
H01J37/244 |
主分类号 |
H01J37/244 |
| 代理机构 |
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