EVAPORATION SOURCE OF A DEPOSITION SYSTEM AND CONTROL METHOD THEREOF

摘要

PURPOSE: An evaporation source of a deposition system, capable of deposition material input is provided to improve quality of thin film by preventing the exposing of a thin film remainder to a high temperature atmosphere after inputting the material into an evaporation source part. CONSTITUTION: An evaporation source of a deposition system comprises follows. An automatic feed unit(20) includes a depositing material storage(30), a depositing material feed port(40) and a controller(60). The depositing material feed port supplies the depositing material to an evaporation source part(2) through the forwarding and rotating motion The controller controls the depositing material storage and depositing material feed port.