发明名称 |
Method of preparing organometallic compounds |
摘要 |
A method of preparing an ultra-pure metal amidinate compound comprising using a microchannel device for synthesis in reacting a metal halide solution with a lithium amidinate solution to produce an ultra-pure alkylmetal compound for processes such as chemical vapor deposition.
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申请公布号 |
US7919638(B2) |
申请公布日期 |
2011.04.05 |
申请号 |
US20100701518 |
申请日期 |
2010.02.05 |
申请人 |
ROHM AND HAAS COMPANY |
发明人 |
LIPIECKI FRANCIS JOSEPH;MAROLDO STEPHEN G.;SHENAI-KHATKHATE DEODATTA VINAYAK;WARE ROBERT A. |
分类号 |
C07F5/00;C07F7/00 |
主分类号 |
C07F5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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