发明名称 Semiconductor device and method of forming the same
摘要 A semiconductor device includes a first insulating layer, a capacitor, an adhesive layer, and an intermediate layer. The first insulating layer may include a first insulating film. The first insulating layered structure has a first hole. The capacitor is disposed in the first hole. The capacitor may include bottom and top electrodes and a capacitive insulating film. The capacitive insulating film is sandwiched between the bottom and top electrodes. The adhesive layer contacts with the bottom electrode. The adhesive layer has adhesiveness to the bottom electrode. The intermediate layer is interposed between the adhesive layer and the first insulating film. The intermediate layer contacts with the adhesive layer and with the first insulating film. The intermediate layer has adhesiveness to the adhesive layer and to the first insulating film.
申请公布号 US7919385(B2) 申请公布日期 2011.04.05
申请号 US20090400410 申请日期 2009.03.09
申请人 ELPIDA MEMORY, INC. 发明人 NAKAMURA YOSHITAKA
分类号 H01L21/20 主分类号 H01L21/20
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