| 摘要 |
PURPOSE: A laser scanning device is provided to reduce errors caused of inertia by operating a low mass reflecting mirror with a substrate and layer fixed. CONSTITUTION: A laser scanning device comprises a vibrator(110), a scanner(150), an optical system and a controller(180). The vibrator generates laser. The scanner includes a drive motor and moves the location of X and Y plane surface of a substrate(170). The optical system comprises a beam extension unit controlling the beam width of the laser emitted from the laser generator. The controller controls the output of the scanner, laser and optical system.
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