| 摘要 |
PURPOSE: A method for controlling the measurement of by-product gas is provided to improve measuring accuracy using accumulated average and arithmetic average. CONSTITUTION: A method for controlling the measurement of by-product gas comprises the following steps. The measurement value of by-product gas is inputted from multiple measuring instruments(S1). The arithmetical average of the measurement value is calculated(S2). The arithmetic mean value is integrated so the accumulated average is calculated(S3). The measurement value, the arithmetic mean value, and accumulated mean value are indicated(S4).
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